Enhancement mode JFET dynamic memory

Static information storage and retrieval – Magnetic bubbles – Guide structure

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357 13, 357 23, 357 30, 357 41, 365149, 365185, 357 15, 357 55, 357 71, H01L 2710, H01L 2712, H01L 2980, G11C 1140

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044344333

ABSTRACT:
A multiplicity of field effect type semiconductor memory elements are formed perpendicular to a surface of a semiconductor wafer. Charge carriers are transported in the semiconductor bulk perpendicular to the surface and a potential barrier is formed in the current path to accomplish storing. Since the bulk mobility of a semiconductor is far larger than the surface mobility, the transit time of the carriers is much improved. Furthermore, since each structure of the memory cells is formed perpendicular to the semiconductor surface, the surface occupation area per memory cell is reduced. Thus, a high-speed and high-density semiconductor memory device is provided.

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