Enhanced vacuum arc vapor deposition electrode

Details Enhanced vacuum arc vapor deposition electrode Enhanced vacuum arc vapor deposition electrode

1996-12-24

1999-04-06

Dang, Thi

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

20429805, 20419238, 20429841, 427526, 427531, 427250, 427580, 118723VE, 118723DC, 118723ER, C23C 1400

Patent

active

058913122

ABSTRACT:
A process for forming a thin metal coating on a substrate wherein a gas stream heated by an electrical current impinges on a metallic target in a vacuum chamber to form a molten pool of the metal and then vaporize a portion of the pool, with the source of the heated gas stream being on one side of the target and the substrate being on the other side of the target such that most of the metallic vapor from the target is directed at the substrate.

REFERENCES:
patent: 4863581 (1989-09-01), Inokuti et al.
patent: 5013578 (1991-05-01), Brown et al.
patent: 5380415 (1995-01-01), Poorman et al.

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