Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1995-06-29
1997-01-21
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310324, 310348, 310349, 310365, H01L 4108
Patent
active
055962394
ABSTRACT:
A high quality factor resonator (15) including a substrate (110) and a resonator layer (150). The resonator layer includes a first electrode (157). The resonator layer (150) is disposed on a surface of the substrate (110). The first electrode (157) is disposed on a distal surface of the resonator layer (150). A cavity (120) is disposed between the substrate (110) and the resonator layer (150) and a second electrode (159) is disposed on the substrate (110) and on a surface of the cavity (120) remote from the resonator layer (150) and is separated from the resonator layer (150) by a thin gap.
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Dougherty Thomas M.
Fliegel Frederick M.
Motorola Inc.
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