Dynamic magnetic information storage or retrieval – Head – Core
Reexamination Certificate
2006-12-22
2010-10-12
Cao, Allen T (Department: 2627)
Dynamic magnetic information storage or retrieval
Head
Core
Reexamination Certificate
active
07813080
ABSTRACT:
Systems and methods for enhanced planarization liftoff structures. In accordance with a first method embodiment, a method for manufacturing a pole tip for magnetic recording comprises accessing a wafer comprising a plurality of pole tips and a plurality of pole tip masks corresponding to the plurality of pole tips. Non magnetic material is filled adjacent to the plurality of pole tips. Material adjacent to the plurality of pole tips is etched. Subsequent to the etching, the wafer is planarized to a level equal to or higher than a level of the trailing edges of the plurality of pole tips. The enhanced liftoff structure enables decreased planarization processing, resulting in a decreased process window. As a beneficial result, manufacturing throughput and quality are improved.
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Baer Amanda
Lille Jeffrey S.
Yang John Jaekoyun
Cao Allen T
Hitachi Global Storage Technologies - Netherlands B.V.
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