Enhanced megasonic based clean using an alternative cleaning...

Details Enhanced megasonic based clean using an alternative cleaning... Enhanced megasonic based clean using an alternative cleaning...

2007-10-23

2007-10-23

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S001000, C134S002000, C134S019000, C510S175000, C438S906000

Reexamination Certificate

active

11058723

ABSTRACT:
The present invention relates to the use of a C1to C5alcohol during the cleaning step. With the use of said alcohol, the surface tension of the solution is reduced which allows the application of reduced megasonic power with increased cleaning efficiency.

REFERENCES:
patent: 5143103 (1992-09-01), Basso et al.
patent: 5922136 (1999-07-01), Huang
patent: 6430965 (2002-08-01), Eda et al.
patent: 2005/0081884 (2005-04-01), Ramachandran et al.
patent: 10-27771 (1998-01-01), None
patent: 2000-195833 (2000-07-01), None

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