Enhanced ceramic material for precision alignment mechanism

Details Enhanced ceramic material for precision alignment mechanism Enhanced ceramic material for precision alignment mechanism

2006-08-15

2006-08-15

Sample, David (Department: 1755)

Compositions: ceramic

Ceramic compositions

Refractory

C501S153000

Reexamination Certificate

active

07091146

ABSTRACT:
Ceramics containing 80 wt % or greater of alumina (Al2O3), with Mn, Ti, Fe, Si, Ca and Mg, with Mn—Al spinal (MnO.Al2O3) crystals and anorthite crystals (CaO.Al2O3.2SiO2) generated by calcination, and having a volume resistivity of 1×1011Ω·cm or less. Preferably, the ceramics contains a combined weight of 2–11 wt % or greater of Mn, Ti and Fe as the oxides, 0.5 wt % or greater of Mn as manganese dioxide (MnO2), 0.5 wt % or greater of Ti as titanium oxide (TiO2), and 0.5 wt % or greater of Fe as iron oxide (Fe2O3).

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