Energy spectrum measuring apparatus, electron energy loss...

Details Energy spectrum measuring apparatus, electron energy loss... Energy spectrum measuring apparatus, electron energy loss...

2007-07-31

2007-07-31

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Electron energy analysis

C250S311000

Reexamination Certificate

active

11372057

ABSTRACT:
An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.

REFERENCES:
patent: 5004918 (1991-04-01), Tsuno et al.
patent: 5590168 (1996-12-01), Iketaki
patent: 5798524 (1998-08-01), Kundmann et al.
patent: 6184524 (2001-02-01), Brink et al.
patent: 6703613 (2004-03-01), Kaji et al.
patent: 7067805 (2006-06-01), Kajl et al.
patent: 10-213538 (1998-08-01), None
patent: 11-067138 (1999-03-01), None
patent: 2000-113854 (2000-04-01), None
patent: 2000-348670 (2000-12-01), None
patent: WO 00/41206 (2000-07-01), None
A. Bleloch et al., “Canceling Energy Drift in a PEELS Spectrometer,” Inst. Phys. Conf. Ser. No. 161: Section 5; IOP Publishing, No. 161, pp. 195-198.
K. Yoshida et al., “A Partially Metalbacked YAG Scintillator for Parallel Detector in EELS,” Journal of Electron Microscopy, Japanese Society for Electron Microscopy, Tokyo, JP, vol. 39, No. 4, Aug. 1, 1990, pp. 273-274.

Affiliated with

Also associated with

Rating

Energy spectrum measuring apparatus, electron energy loss... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Energy spectrum measuring apparatus, electron energy loss..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Energy spectrum measuring apparatus, electron energy loss... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3742336