Compositions – Electrically conductive or emissive compositions
Patent
1998-05-28
2000-10-17
Kopec, Mark
Compositions
Electrically conductive or emissive compositions
H01B 112, H01B 120
Patent
active
061326445
ABSTRACT:
The present invention is an admixture of an electrically conductive material and an energy sensitive material resulting in a conductive energy sensitive composition. The structures are useful for lithography in microelectronic fabrication to avoid the effects of charging on resists from electron beams. The compositions are also useful in applications of scanning electron metrology and static dissipation.
REFERENCES:
patent: 5137799 (1992-08-01), Kaempf et al.
patent: 5198153 (1993-03-01), Angelopoulos et al.
patent: 5370825 (1994-12-01), Angelopoulos et al.
patent: 5721299 (1998-02-01), Angelopoulos et al.
Angelopoulos Marie
Babich Edward D.
Babich Inna V.
Chen Kuang-Jung
Moreau Wayne Martin
International Business Machines - Corporation
Kopec Mark
Morris Daniel P.
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