Energy-selected electron imaging filter

Details Energy-selected electron imaging filter Energy-selected electron imaging filter

1987-08-28

1989-07-25

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250311, 250396ML, H01J 4944

Patent

active

048516708

ABSTRACT:
Quadruple lenses 30, 31 and 32 and sextupole lenses 40, 41, 42, and 43 are interposed between a energy-dispersing device 17 and an electron imaging device 50 in an energy-selected electron imaging filter. The energy-dispersing device produces a focussed spectrum 21 of electron energies in the plane of an energy-selecting slit 20, and the quadrupole and sextupole lenses transform the spectrum into an energy-selecting slit may also be either removed or opened wide, and the quadrupole lenses may be refocussed, so that the electron imaging device directly observes a magnified spectrum of the electron energies.

REFERENCES:
patent: 3256433 (1966-06-01), Watanabe et al.
patent: 3979590 (1976-09-01), Anderson
patent: 4006895 (1978-01-01), Iwanaga
patent: 4191887 (1980-03-01), Brown
patent: 4414474 (1983-11-01), Creive
patent: 4486664 (1984-12-01), Wollnik
patent: 4612440 (1986-09-01), Brunnee et al.
patent: 4743756 (1988-05-01), Krivanek

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