Radiant energy – Ionic separation or analysis
Reexamination Certificate
2007-07-31
2007-07-31
Wells, Nikita (Department: 2881)
Radiant energy
Ionic separation or analysis
C250S305000, C250S306000, C250S310000
Reexamination Certificate
active
10533598
ABSTRACT:
The invention relates to an energy filter image generator for filtering electrically charged particles. The inventive energy filter comprises at least two toroidal energy analysers (30, 40) arranged one inside the other. A transfer lens device (20) is disposed between the plane of emergence (5) of the first energy analyser (30) and the plane of incidence of the second energy analyser (40), thereby making it possible to obtain the perfect energy filtered reproduction of the surface (1′) of a sample on a detector (10).
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Escher Matthias
Funnemann Dietmar
Calfee Halter & Griswold LLP
Omicron Nano Technology GmbH
Wells Nikita
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