Radiant energy – Electron energy analysis
Patent
1998-08-25
2000-11-21
Nguyen, Kiet T.
Radiant energy
Electron energy analysis
250311, 250396ML, H01J 4946
Patent
active
061506575
ABSTRACT:
An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.
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Aoyama Takashi
Isakozawa Shigeto
Kimoto Koji
Saito Masakazu
Sekiguchi Tomoko
Hitachi , Ltd.
Nguyen Kiet T.
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