Energy filter and electron microscope equipped with the energy f

Radiant energy – Electron energy analysis

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250311, 250396ML, H01J 4946

Patent

active

061506575

ABSTRACT:
An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.

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patent: 5955732 (1999-09-01), Tsuno
F.R. Egerton: Electron Energy-Loss Spectroscopy in the Electron Microscope, Plenum Press (1986), pp. 1-25.
Ludwig Reimer Ed.: Energy-Filtering Transmission Electron Microscopy, Springer (1995), pp. 1-42.
J.C.H. Spence and J.M. Zuo: Electron Microdiffraction, Plenum Press (1992), pp. 213-244.
O.L. Krivanek, A.J. Gubbens and N. Dellby: Microsc. Microanal. Microstruct. 2(1991), pp. 315-332.
N. Ajika, H. Hashimoto, K. Yamaguchi and H. Endoh: Japanese Journal of Applied Physics, 24 (1985), pp. L41-L44.
Computer Program "Trio" for Third Order Calculation of Ion Trajectory by Akekiyo Matsuo et al.: Mass Spectroscopy, vol. 24 No. 1, Mar. 1976, pp. 19-62.

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