Energy filter and electron microscope

Details Energy filter and electron microscope Energy filter and electron microscope

2005-11-01

2005-11-01

Lee, John R. (Department: 2881)

Radiant energy

Electron energy analysis

C250S310000, C250S311000, C250S281000, C250S287000, C250S293000, C250S397000, C250S398000, C250S3960ML

Reexamination Certificate

active

06960763

ABSTRACT:
An energy filter with reduced aberration. The energy filter has a first stage of filter for receiving an electron beam entering along the optical axis and for focusing the beam in one direction vertical to the optical axis and a second stage of filter positioned along the optical axis behind the first stage of filter. The beam once focused by the first stage of filter is made to enter the second stage of filter. In the second stage of filter, the orbit of the electron beam is inverted with respect to the focal point. The two stages of filters are identical in length taken along the optical axis. The first and second stages of filters have electric and magnetic quadrupole fields, respectively, along the optical axis. These quadrupole fields make an angle of 45 degrees to the optical axis to achieve astigmatic focusing.

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H. Rose, “The retarding Wien Filter as a high-performance imaging filter”,Optik 77, No. 1 (1987), pp. 26-34.

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