Radiant energy – Electron energy analysis
Patent
1997-10-16
2000-01-18
Berman, Jack I.
Radiant energy
Electron energy analysis
250396ML, H01J 4944
Patent
active
060159731
ABSTRACT:
There is disclosed an energy filter having polepieces which form lenses and are mounted at accuracies that can be easily checked. The positions of the lenses can be easily readjusted. The lenses are mounted to a base plate and stacked on top of each other between two polepieces via two spacers. The polepieces form magnetic poles. These lenses are mounted to the base plate with screws so as to form a passage.
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patent: 4740704 (1988-04-01), Rose et al.
patent: 5126565 (1992-06-01), Rose
patent: 5177361 (1993-01-01), Krahl et al.
patent: 5449914 (1995-09-01), Rose et al.
patent: 5585630 (1996-12-01), Taniguchi et al.
"High-Resolution imaging magnetic energy filters with simple structure", S. Lanio, Optik, 73, No. 3 (1986), pp. 99-107.
Berman Jack I.
Jeol Ltd.
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