Energy enhanced surface planarization

Details Energy enhanced surface planarization Energy enhanced surface planarization

2007-01-02

2007-01-02

Hassanzadeh, Parviz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

C156S345130

Reexamination Certificate

active

10883396

ABSTRACT:
A substrate processing apparatus equipped to employ an energy directed at a process side of a substrate to enhance and control material removal is provided.

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Diagnostic Imaging: Ultrasound taken from www.antonine-education.co.uk.
NDT Resource Center, Eddy Currents from www.ndt-ed.org.

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