Stock material or miscellaneous articles – Composite – Of metal
Reexamination Certificate
2007-03-22
2011-12-13
Roman, Angel (Department: 2812)
Stock material or miscellaneous articles
Composite
Of metal
C428S472000, C428S701000, C428S702000
Reexamination Certificate
active
08076005
ABSTRACT:
High density oxide films are deposited by a pulsed-DC, biased, reactive sputtering process from a titanium containing target to form high quality titanium containing oxide films. A method of forming a titanium based layer or film according to the present invention includes depositing a layer of titanium containing oxide by pulsed-DC, biased reactive sputtering process on a substrate. In some embodiments, the layer is TiO2. In some embodiments, the layer is a sub-oxide of Titanium. In some embodiments, the layer is TixOywherein x is between about 1 and about 4 and y is between about 1 and about 7. In some embodiments, the layer can be doped with one or more rare-earth ions. Such layers are useful in energy and charge storage, and energy conversion technologies.
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Demaray Richard E.
Milonopoulou Vassiliki
Narasimhan Mukundan
Zhang Hong Mei
Haynes and Boone LLP
Roman Angel
SpringWorks LLC
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