Energy beam locating

Details Energy beam locating Energy beam locating

1991-04-05

1992-08-04

Berman, Jack I.

Radiant energy

Means to align or position an object relative to a source or...

2504922, H01J 37304

Patent

active

051361698

ABSTRACT:
A method of monitoring the travel of a beam of energy on a substrate having a fiducial pattern rigidly fixed relative to the substrate, the pattern embracing an area where the beam can create a useful image with submicron precision. The method includes: adjusting the beam such that the dose delivered by the beam is sufficiently high to generate a signal produced by the interaction of the beam and the fiducial pattern, the signal being representative of the relative position of the fiducial pattern and the travel, the dose being sufficiently low so that the area of the substrate over which the beam passes remains receptive to subsequent creation, with submicron precision, of a useful image; moving the beam across the substrate; detecting the signal produced by the interaction of the beam with the fiducial pattern; and comparing the detected signal with a predetermined signal to provide a position signal representative of the beam travel with submicron precision.

REFERENCES:
patent: 4327292 (1982-04-01), Wang et al.
patent: 4413186 (1983-11-01), Uema
patent: 4443703 (1984-04-01), Shimazu et al.
patent: 4443704 (1984-04-01), Yamashita et al.
patent: 4467211 (1984-08-01), Smith et al.
patent: 4827138 (1989-05-01), Randall
patent: 4890309 (1989-12-01), Smith et al.
patent: 4977328 (1990-12-01), Van Vucht

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