Dynamic information storage or retrieval – Specific detail of information handling portion of system – Radiation beam modification of or by storage medium
Reexamination Certificate
2007-02-27
2007-02-27
Tran, Thang V. (Department: 2627)
Dynamic information storage or retrieval
Specific detail of information handling portion of system
Radiation beam modification of or by storage medium
C250S492100, C250S360100, C250S297000
Reexamination Certificate
active
10806119
ABSTRACT:
An energy beam irradiating apparatus includes a substrate holder, a moving stage, an energy beam irradiating mechanism, and a control unit. A disc-like substrate is attached to the substrate holder which includes a holder main part on which the disc-like substrate is mounted and a pressing plate, the disc-like substrate being held between the holder main part and the pressing plate with a formation region of an irradiation pattern on the disc-like substrate and a partial region of at least one of an outer edge and an inner edge of the disc-like substrate being exposed. The moving stage moves the substrate holder. The energy beam irradiating mechanism irradiates a surface of the disc-like substrate attached to the substrate holder with an energy beam. The control unit causes the moving stage to move based on a movement pattern with a reference point set in advance on the moving stage as a reference so that an irradiation pattern is formed on the surface of the disc substrate by irradiation with the energy beam. During formation of the irradiation pattern, the control unit calculates a center of the disc-like substrate based on at least one part of an outline of the exposed outer edge or inner edge of the disc-like substrate and sets the calculated center as the reference point.
REFERENCES:
patent: 6307826 (2001-10-01), Katsumura et al.
patent: 6686597 (2004-02-01), Kumasaka et al.
patent: 6697317 (2004-02-01), Hagiwara
patent: 6882615 (2005-04-01), Katsumura
patent: 6933508 (2005-08-01), Popiolkowski et al.
patent: 7113360 (2006-09-01), Formato et al.
patent: 2001/0052577 (2001-12-01), Aki et al.
patent: 04356912 (1992-12-01), None
patent: 2001-242300 (2001-09-01), None
English Language Abstract of JP 2001-242300.
Nakada Katsuyuki
Takai Mitsuru
Greenblum & Bernstein P.L.C.
TDK Corporation
Tran Thang V.
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