Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate
2004-05-26
2008-08-19
McDonald, Rodney G (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
C204S298030, C204S298070, C204S298080, C204S298090, C204S298330, C204S298340, C204S298350, C118S719000, C156S345330, C156S345370, C156S345310
Reexamination Certificate
active
07413639
ABSTRACT:
The invention relates to an energy and media connection module for coating installations. Said module serves for supplying with cooling water, compressed air, process gases, signal, control and cathode power. It can be moved from one coating chamber to another coating chamber along a coating line by a single person in a short time. Further, it is possible to separate the energy connection module from a coating chamber for maintenance or displacement purposes without mechanically demounting all connections.
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Hattendorf Guido
Rist Gerhard
Rödling Gert
Applied Materials GmbH & Co. KG
Fulbright & Jaworski L.L.P.
McDonald Rodney G
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