Energy and analysis detection system for surface chemical analys

Details Energy and analysis detection system for surface chemical analys Energy and analysis detection system for surface chemical analys

1987-06-24

1988-04-12

Church, Craig E.

Radiant energy

Electron energy analysis

250397, H01J 4948

Patent

active

047376392

ABSTRACT:
The present invention is directed to an energy analysis and detection system for surface chemical analysis which includes an input lens system for receiving charged particles, said lens system having a first lens stage for definition of analysis area and angular acceptance and a second lens stage for energy adjustment with an aperture assembly interposed between the first lens stage and second lens stage, a spherical capacitor energy analyzer for receiving the output from the input lens system and performing spectroscopic energy resolution, and a detector assembly for receiving the output from the spherical capacitor energy analyzer and detecting the charged particles.

REFERENCES:
patent: 4048498 (1971-09-01), Gerlach et al.
patent: 4358680 (1982-11-01), Read

Affiliated with

Also associated with

Rating

Energy and analysis detection system for surface chemical analys does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Energy and analysis detection system for surface chemical analys, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Energy and analysis detection system for surface chemical analys will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1430426