Photocopying – Projection printing and copying cameras – Methods
Patent
1995-02-27
1995-12-05
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Methods
355 53, 355 69, 372 25, G03B 2732
Patent
active
054734126
ABSTRACT:
The average number N of coarse exposure pulses is obtained by dividing a proper exposure amount to a wafer by the average pulse energy. Under a condition that the average number N of coarse exposure pulses is equal to or more than the minimum number of pulses N.sub.min, the achievement accuracy R is calculated by dividing the actual accumulated exposure amount to the wafer by the proper exposure amount and the coarse exposure is performed until the achievement accuracy R reaches the coarse exposure finish judgment level Rc. Thereafter, the attenuating rate for pulse lights is set to be a predetermined value and the correcting exposure is performed by the cutoff control method until the achievement accuracy R reaches the correction exposure finish judgment level Rcc.
REFERENCES:
patent: 4711568 (1987-12-01), Torigoe
patent: 4884101 (1989-11-01), Tanimoto
patent: 4908656 (1990-03-01), Suwa et al.
patent: 4952945 (1990-08-01), Hikima
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5053614 (1991-10-01), Yui et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5107275 (1992-04-01), Tsuruoka et al.
patent: 5119390 (1992-06-01), Ohmori
patent: 5171965 (1992-12-01), Suzuki et al.
patent: 5191374 (1993-03-01), Hazama et al.
patent: 5250797 (1993-10-01), Sano et al.
Nikon Corporation
Wintercorn Richard A.
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