Endeffectors for handling semiconductor wafers

Details Endeffectors for handling semiconductor wafers Endeffectors for handling semiconductor wafers

2004-02-18

2010-02-02

Chin, Paul T (Department: 3652)

Handling: hand and hoist-line implements

Grapple

Fixed and moveable jaw

C294S064200, C414S941000, C901S040000

Reexamination Certificate

active

07654596

ABSTRACT:
Various endeffector designs are disclosed for handling semiconductor wafers. For instance, an endeffector for handling wafers at a relatively low temperature is disclosed along with an endeffector for handling wafers at a relatively high temperature. Both endeffectors include uniquely designed support members that are configured to only contact a wafer at the wafer's edge. The endeffectors may also include a wafer detection system. The endeffector for handling wafers at relatively low temperatures may also include a pushing device that is used not only to position a wafer but to hold a wafer on the endeffector during acceleration or deceleration of the endeffector caused by a robot arm attached to the endeffector. As designed, the endeffectors may have a very slim profile making the endeffectors easily maneuverable.

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Technical Bulletin from Festo AG & Co. for DFC-4-10-P-GF 189452, 5 pages.
Communication Relating to the Results of the Partial International Search for PCT/US2004/008767, Apr. 22, 2005.

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