End-effectors for handling microelectronic workpieces

Details End-effectors for handling microelectronic workpieces End-effectors for handling microelectronic workpieces

2007-10-16

2007-10-16

Mackey, Patrick (Department: 3652)

Handling: hand and hoist-line implements

Grapple

Fixed and moveable jaw

C294S907000, C414S744500, C414S744800, C901S031000, C901S036000, C901S039000

Reexamination Certificate

active

10195137

ABSTRACT:
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.

REFERENCES:
patent: 4451197 (1984-05-01), Lange
patent: 4639028 (1987-01-01), Olson
patent: 4670126 (1987-06-01), Messer
patent: 4744713 (1988-05-01), Hrovath
patent: 4770590 (1988-09-01), Hugues
patent: 4944650 (1990-07-01), Matsumoto
patent: 5022695 (1991-06-01), Ayers
patent: 5044752 (1991-09-01), Thurfjell
patent: 5133635 (1992-07-01), Malin
patent: 5178512 (1993-01-01), Skrobak
patent: 5201838 (1993-04-01), Roudaut
patent: 5445486 (1995-08-01), Kitayama
patent: 5460478 (1995-10-01), Akimoto
patent: 5639206 (1997-06-01), Oda
patent: 5669752 (1997-09-01), Moon
patent: 5711646 (1998-01-01), Ueda
patent: 5746565 (1998-05-01), Tepolt
patent: 5759006 (1998-06-01), Miyamoto
patent: 5810935 (1998-09-01), Lee et al.
patent: 5980194 (1999-11-01), Freerks
patent: 6080691 (2000-06-01), Lindsay et al.
patent: 6084215 (2000-07-01), Furuya
patent: 6109677 (2000-08-01), Anthony
patent: 6113165 (2000-09-01), Wen
patent: 6116848 (2000-09-01), Thomas
patent: 6136163 (2000-10-01), Cheung et al.
patent: 6155773 (2000-12-01), Ebbing et al.
patent: 6228232 (2001-05-01), Woodruff et al.
patent: 6256555 (2001-07-01), Bacchi
patent: 6275748 (2001-08-01), Bacchi
patent: 6280583 (2001-08-01), Woodruff et al.
patent: 6283701 (2001-09-01), Sundar et al.
patent: 6749390 (2001-09-01), Woodruff
patent: 6303010 (2001-10-01), Woodruff et al.
patent: 6309520 (2001-10-01), Woodruff et al.
patent: 6309524 (2001-10-01), Woodruff et al.
patent: 6318951 (2001-11-01), Schmidt et al.
patent: 6322119 (2001-11-01), Schmidt et al.
patent: 6322312 (2001-11-01), Sundar
patent: 6326755 (2001-12-01), Babbs
patent: 6409453 (2002-06-01), Brodine
patent: 6453214 (2002-09-01), Bacchi
patent: 6467827 (2002-10-01), Ardezzone
patent: 6471913 (2002-10-01), Weaver et al.
patent: 6491330 (2002-12-01), Mankame et al.
patent: 6569297 (2003-05-01), Wilson et al.
patent: 6612589 (2003-09-01), Saito
patent: 6631935 (2003-10-01), Casarotti
patent: 6660137 (2003-12-01), Wilson et al.
patent: 6678581 (2004-01-01), Hung et al.
patent: 6685422 (2004-02-01), Sundar et al.
patent: 6692049 (2004-02-01), Holbrooks
patent: 6752584 (2004-06-01), Woodruff
patent: 6780374 (2004-08-01), Weaver
patent: 2003/0082042 (2003-05-01), Woodruff
patent: 2003/0085582 (2003-05-01), Wooddruff
patent: 2003/0159921 (2003-08-01), Harris et al.
patent: 2005/0087439 (2005-04-01), Hanson
patent: 2005/0121317 (2005-06-01), Klocke
patent: 00/02808 (2000-01-01), None
Integral Spin Coater/ Processor; A-No. 1 Proof TR8000 Series; 8 pages; TAZMO, Ltd.; Japan. (Date unknown).

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