Material or article handling – Horizontally swinging load support – Swinging about pivot
Reexamination Certificate
2005-12-20
2005-12-20
Underwood, Donald W. (Department: 3652)
Material or article handling
Horizontally swinging load support
Swinging about pivot
C294S001200, C294S907000, C414S808000, C901S033000
Reexamination Certificate
active
06976822
ABSTRACT:
Passive end-effectors for handling microelectronic workpieces having a perimeter edge circumscribing a first diameter. In one embodiment, a passive end-effector in accordance with the invention includes a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece. The body, for example, can be a paddle or a fork. The passive end-effector can also include a plurality of passive abutments that are carried by the body. The abutments are located along the circle, and the abutments are configured to support the workpiece in a plane spaced apart from the body. The abutments, for example, can each include an inclined surface that slopes downwardly toward a central region of the circle to support only the edge of the workpiece in a manner that suspends or otherwise spaces the workpiece in a plane that is spaced apart from the body. The passive end-effector can further include a sensor assembly that is carried by the body. The sensor includes an engagement member positioned at least partially within the circle, and the engagement member is configured to move generally transverse to the plane as the workpiece is loaded on and unloaded from the end-effector. The passive end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane of the workpiece.
REFERENCES:
patent: 4451197 (1984-05-01), Lange
patent: 4639028 (1987-01-01), Olson
patent: 4670126 (1987-06-01), Messer et al.
patent: 4744713 (1988-05-01), Hrovath
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4944650 (1990-07-01), Matsumoto
patent: 5178512 (1993-01-01), Skrobak
patent: 5442416 (1995-08-01), Tateyama et al.
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5639206 (1997-06-01), Oda et al.
patent: 5711646 (1998-01-01), Ueda et al.
patent: 5746565 (1998-05-01), Tepolt
patent: 5759006 (1998-06-01), Miyamoto et al.
patent: 6084215 (2000-07-01), Furuya et al.
patent: 6089635 (2000-07-01), Lee
patent: 6113165 (2000-09-01), Wen et al.
patent: 6203084 (2001-03-01), Kruk et al.
patent: 6206441 (2001-03-01), Wen et al.
patent: WO 00/02808 (2000-01-01), None
Erickson James J.
Woodruff Daniel J.
Perkins Coie LLP
Semitool Inc.
LandOfFree
End-effectors and transfer devices for handling... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with End-effectors and transfer devices for handling..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and End-effectors and transfer devices for handling... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3507377