End effector for nano manufacturing

Details End effector for nano manufacturing End effector for nano manufacturing

2006-07-21

2011-12-20

Caputo, Lisa (Department: 2855)

Measuring and testing

Instrument mechanism or transmission

C422S501000, C422S502000, C977S872000, C073S863020, C073S704000

Reexamination Certificate

active

08079278

ABSTRACT:
An end-effector is provided for use on a micro
ano manipulation device. The end-effector is comprised of: a micropump fluidly coupled to a microtube; a piezoelectric sensing structure disposed in the microtube; and a processing circuit electrically coupled to the sensing structure for determining the force of the fluid flowing through the microtube. The end-effector is a closed loop control-enabled micro
ano manipulation system.

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