Coating apparatus – Work holders – or handling devices
Patent
1998-04-14
2000-04-18
Edwards, Laura
Coating apparatus
Work holders, or handling devices
118503, 414935, 414936, 414937, 414941, B05C 1300, B65G 4907
Patent
active
060510668
ABSTRACT:
This invention relates to apparatus for, and methods of, providing controlled depositions on substrates. The substrates are particularly adapted to provide die for use as the spacers in magnetic heads to dispose the magnetic heads in almost abutting relationship to a memory medium such as a disc and to protect the heads against damage by the disc if the disc should contact the heads while the disc is rotating at a high speed.
This invention is particularly concerned with an end effector apparatus disposed in a transport module between a cassette module on one side of the transport module and a process module on the other side of the transport module. The end effector apparatus provides a controlled transfer of substrates between a cassette holder in the cassette module and apparatus disposed in the process module for producing a controlled deposition on the substrate.
REFERENCES:
patent: 4639028 (1987-01-01), Olson
patent: 4970512 (1990-11-01), Lee et al.
patent: 5004399 (1991-04-01), Sullivan et al.
patent: 5133635 (1992-07-01), Malin et al.
patent: 5227708 (1993-07-01), Lowrance
patent: 5746460 (1998-05-01), Marohl et al.
Edwards Laura
Lorengo J. A.
Roston Ellsworth R.
Sputtered Films, Inc.
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