End effector assembly for inclusion in a system for producing un

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

414217, 414941, B65G 4907

Patent

active

061493678

ABSTRACT:
An end effector in a transport module includes a body and a web defined by a panel and first and second flanges at opposite panel ends. The first flange is attached to the body. The second flange is displaced from, and transverse to, the panel. Rods extending through the flanges into the body rigidify the web. Springs disposed in holes in the body and extending between the first flange and the body balance the web relative to the body. The second flange and a ledge on the body adjacent the first flange support the substrate opposite ends with the central portion of the substrate displaced from the body and the web. A robotic assembly formed from a plurality of arms is coupled to the body. The arms are pivotable relative to one another and to the body between contracted and expanded relationships. With the arms contracted, the body and the web are rotatable in the transport module between positions facing the cassette module or the process module. The cassette module includes a cassette holder with grooves for holding cassettes. When the expanded arms face the cassette module, the web abuts a substrate in the cassette holder. When the cassette is moved vertically, the substrate becomes free in the groove for transfer by the robotic assembly into the transport module. When the expanded arms face the process module, the substrate is transferrable into the process module to receive a deposition on the substrate central portion by members in the process module.

REFERENCES:
patent: 5387067 (1995-02-01), Grunes
patent: 5445486 (1995-08-01), Kitayama et al.
patent: 5558482 (1996-09-01), Hiroki et al.
patent: 5636964 (1997-06-01), Somekh et al.
patent: 5647626 (1997-07-01), Chen et al.
patent: 5669644 (1997-09-01), Kaihotsu et al.
patent: 5711646 (1998-01-01), Ueda et al.
patent: 5746460 (1998-05-01), Marohl et al.
patent: 5830272 (1998-11-01), Begin et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

End effector assembly for inclusion in a system for producing un does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with End effector assembly for inclusion in a system for producing un, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and End effector assembly for inclusion in a system for producing un will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1251685

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.