Encoder utilizing interference using multi-mode semiconductor la

Details Encoder utilizing interference using multi-mode semiconductor la Encoder utilizing interference using multi-mode semiconductor la

1991-11-12

1993-03-30

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

25023116, 250237G, G01B 902

Patent

active

051988739

ABSTRACT:
An interferometer for measuring the displacement of a diffraction grating includes a multi-mode semiconductor laser for generating a laser beam; a device for supplying a predetermined current to the laser so that at least five vertical modes occur in an oscillation spectrum of the laser beam generated by the laser at an intensity ratio of at least 0.05; and an optical system for splitting the laser beam generated by the laser into first and second beams. The optical system also directs the first and second beams to the diffraction grating and effects interference between a first diffracted light beam generated by the diffraction of the first beam at the diffraction grating and a second diffracted light beam generated by the diffraction of the second beam at the diffraction grating to produce an interference light beam. Also provided is a photoelectric convertor for converting the interference light beam into an electrical signal.

REFERENCES:
patent: 4629886 (1986-12-01), Akiyama et al.
patent: 4676645 (1987-06-01), Taniguchi et al.
patent: 4829342 (1989-05-01), Nishimura
patent: 4868385 (1989-09-01), Nishimura
Optics Letters, vol. 13, No. 8, published Aug., 1988, pp. 628-630, by Wei-Kuo Chen and Pao-Lo Liu.

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