Encoder having atomic or molecular structure reference scale

Details Encoder having atomic or molecular structure reference scale Encoder having atomic or molecular structure reference scale

1990-04-27

1992-09-22

Wieder, Kenneth A.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

250306, 359 78, G01N 2700

Patent

active

051500353

ABSTRACT:
An encoder has a reference scale having periodic structure of atoms or molecules in a predetermined direction, a probe disposed in opposed relationship with the reference scale, the probe being used to detect the structural variation information of the periodic structure of the reference scale, and relative displacement amount detecting means for detecting the amount of relative displacement of the reference scale and the probe along a predetermined direction from the structural variation information obtained by the probe.

REFERENCES:
patent: 4674436 (1987-06-01), Miyazaki et al.
patent: 4785762 (1988-11-01), Miyazaki et al.
patent: 4835083 (1989-05-01), Sakai et al.
patent: 4840821 (1989-06-01), Miyazaki et al.
patent: 4939363 (1990-07-01), Bando et al.
patent: 5001409 (1991-03-01), Hosaka et al.
patent: 5019707 (1991-05-01), Chiu et al.
"Surface Studies by Scanning Tunneling Microscopy", by G. Binning et al., Physical Review, vol. 49, No. 1 Jul 5, 1982, pp. 57-60.

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