Enclosed sealable purgible semiconductor wafer holder

Details Enclosed sealable purgible semiconductor wafer holder Enclosed sealable purgible semiconductor wafer holder

1996-09-11

1998-05-26

Gehman, Bryon P.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

118500, 141 98, 206454, 211 4112, 414217, 414417, B65D 8542

Patent

active

057553327

ABSTRACT:
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. The holder also includes a purging arrangement attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder.

REFERENCES:
patent: Re33361 (1990-10-01), Coe
patent: 3913749 (1975-10-01), Wyers
patent: 3918756 (1975-11-01), Saville et al.
patent: 3923156 (1975-12-01), Wallestad
patent: 3923191 (1975-12-01), Johnson
patent: 3926305 (1975-12-01), Wallestad
patent: 3939973 (1976-02-01), Wallestad
patent: 3961877 (1976-06-01), Johnson
patent: 4043451 (1977-08-01), Johnson
patent: 4061228 (1977-12-01), Johnson
patent: 4248346 (1981-02-01), Johnson
patent: 4450960 (1984-05-01), Johnson
patent: 4471716 (1984-09-01), Milliren
patent: 4520925 (1985-06-01), Johnson
patent: 4532970 (1985-08-01), Tullis et al.
patent: 4543389 (1985-09-01), Tullis
patent: 4555024 (1985-11-01), Voss et al.
patent: 4557382 (1985-12-01), Johnson
patent: 4588086 (1986-05-01), Coe
patent: 4684021 (1987-08-01), Niebling et al.
patent: 4718549 (1988-01-01), Rissotti et al.
patent: 4718552 (1988-01-01), Rossi et al.
patent: 4721207 (1988-01-01), Kikuchi
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4747488 (1988-05-01), Kikuchi
patent: 4752007 (1988-06-01), Rossi et al.
patent: 4793488 (1988-12-01), Mortensen
patent: 4815912 (1989-03-01), Maney et al.
patent: 4817795 (1989-04-01), Kos
patent: 4817799 (1989-04-01), Gregerson et al.
patent: 4827110 (1989-05-01), Rossi et al.
patent: 4833306 (1989-05-01), Milbrett
patent: 4872554 (1989-10-01), Quernemoen
patent: 4880116 (1989-11-01), Kos
patent: 4888473 (1989-12-01), Rossi et al.
patent: 4930634 (1990-06-01), Williams et al.
patent: 4949848 (1990-08-01), Kos
patent: 4966284 (1990-10-01), Gregerson et al.
patent: 4966519 (1990-10-01), Davis et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5024329 (1991-06-01), Grohrock
patent: 5025926 (1991-06-01), Gregerson et al.
patent: 5046615 (1991-09-01), Netl et al.
patent: 5111936 (1992-05-01), Kos
patent: 5154301 (1992-10-01), Kos
patent: 5184723 (1993-02-01), Karl et al.
patent: 5207324 (1993-05-01), Koss
patent: 5217053 (1993-06-01), Foster et al.
patent: 5228568 (1993-07-01), Ogino et al.
patent: 5253755 (1993-10-01), Maenke
patent: 5255783 (1993-10-01), Goodman et al.
patent: 5255797 (1993-10-01), Kos
patent: 5295522 (1994-03-01), De Angelis et al.
patent: 5472086 (1995-12-01), Holliday et al.
Slocum, Alexander H., "Sematech Short Course: Determinatistic Machine Design Increasing Reliability and Performance", Precision Machine Design, Prentice Hall, Englewood Cliffs, 1992, pp. 49-64.

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