Enclosed sealable purgible semiconductor wafer holder

Details Enclosed sealable purgible semiconductor wafer holder Enclosed sealable purgible semiconductor wafer holder

1994-03-11

1995-12-05

Gehman, Bryon P.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

118500, 141 98, 206454, 211 40, 414217, 414417, B65D 8542

Patent

active

054720869

ABSTRACT:
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. The holder also includes a purging arrangement attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder.

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