Fishing – trapping – and vermin destroying
Patent
1995-03-06
1995-10-03
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 72, 437 73, 148DIG50, H01L 2176
Patent
active
054551943
ABSTRACT:
A method for the fabrication of a trench isolation region (44) includes the deposition of first, second, and third oxidizable layers (28, 34, 42). The first oxidizable layer (28) is deposited to overlie the surface of a trench (12) formed in a semiconductor substrate (10). The first oxidizable layer (28) also fills a recess (26) formed in a masking layer (14), and resides adjacent to the upper surface of the trench (12). After oxidizing the first oxidizable layer (28), a second oxidizable layer (34) is deposited to fill the trench (12). A third oxidizable layer (42) is deposited to overlie the second oxidizable layer (34) and fills a remaining portion of the recess (26). An oxidation process is performed to oxidize oxidizable layer (42) and a portion of second oxidizable layer (34) to form a trench isolation region (44). In an alternative embodiment of the invention, a shallow isolation region (46) is formed in proximity to the trench isolation region ( 44).
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Masquelier Michael P.
Roth Scott S.
Vasquez Barbara
Dang Trung
Dockrey Jasper W.
Hearn Brian E.
Motorola Inc.
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