Encapsulated thermofoil heater apparatus and associated methods

Details Encapsulated thermofoil heater apparatus and associated methods Encapsulated thermofoil heater apparatus and associated methods

1997-10-21

2000-07-04

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

C23C 1600

Patent

active

06082297&

ABSTRACT:
An encapsulated heater heats a susceptor within a process module such as for use in CVD, PVD and etch. The heater includes an electrically resistive heating element, e.g., an Inconel trace, that is responsive to applied voltage to radiate heat. A hermetically-sealed HASTELLOY C-22 or stainless steel 304 housing enclosing the element. An inert gas is disposed within the housing at a prescribed pressure, e.g., 150 Torr, for transferring thermal energy from the element to the housing and for preventing oxidation of the heating element. The prescribed pressure reduces differential pressure between inside and outside of the housing while maintaining sufficient thermal conduction through the gas such that the housing radiates and conducts heat the susceptor. A feed-through within the housing can be used to connect the heating element to a voltage source while maintaining the hermetic seal of the housing. Preferably, the resistive element is surrounded with an insulator, e.g., mica, to electrically isolate the resistive element from the housing. A pinch-off tube facilitates injecting the gas within the housing and for sealing the gas therein. The heater is replaceable as a unit within the susceptor to facilitate the manufacturing process in the event of a heater failure.

REFERENCES:
patent: 5306895 (1994-04-01), Ushikoshi et al.
patent: 5595241 (1997-01-01), Jelinek
patent: 5688331 (1997-11-01), Aruga et al.

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