Encapsulated phase change cell structures and methods

Details Encapsulated phase change cell structures and methods Encapsulated phase change cell structures and methods

2009-06-23

2011-11-15

Nhu, David (Department: 2895)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S197000, C438S311000, C438S238000, C257SE21006, C257SE21170, C257SE21320, C257SE21267, C257SE21304, C257SE21435, C257SE21577, C257SE21645, C257SE21646

Reexamination Certificate

active

08058095

ABSTRACT:
Methods and devices associated with phase change cell structures are described herein. In one or more embodiments, a method of forming a phase change cell structure includes forming a substrate protrusion that includes a bottom electrode, forming a phase change material on the substrate protrusion, forming a conductive material on the phase change material, and removing a portion of the conductive material and a portion of the phase change material to form an encapsulated stack structure.

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