Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Multiple contact type
Patent
1996-08-05
2000-02-15
Donovan, Lincoln
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Multiple contact type
257415, H01H 6702
Patent
active
060257679
ABSTRACT:
A micro-relay module includes a substrate and a lid in spaced apart relation, and a solder ring which bonds the lid to the substrate to define a chamber therebetween. A micromachined relay is integrally formed on the substrate or on the lid within the chamber. A gas is contained in the chamber at a gas pressure which is above atmospheric pressure. Input/output pads are included outside the chamber and electrically connected to the micromachined relay. Large numbers of encapsulated modules may be fabricated on a single substrate by integrally forming an array of relays on a face of a first substrate. A second substrate is placed adjacent the face with a corresponding array of solder rings therebetween, such that a respective solder ring surrounds a respective relay. The solder rings are reflowed in a gas atmosphere which is above atmospheric pressure to thereby form an array of high pressure gas encapsulating chambers. The first and second substrates are then singulated for form a plurality of individual micro-relay modules.
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Specification Sheet, NAiS, Ultra Low Profile 2 Amp-PolArized Relay, TK-Relays.
Berry Michele J.
Kellam Mark D.
Donovan Lincoln
MCNC
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