Electric lamp and discharge devices – With evacuating pump
Patent
1988-04-19
1989-05-23
Moore, David K.
Electric lamp and discharge devices
With evacuating pump
313545, 313561, 313311, H01J 3718, H01J 4116
Patent
active
048333620
ABSTRACT:
An encapsulated high brightness source for use in or with an electron beam system such as an electron beam microscope. The source preferably includes a field emitter. The source includes source enclosure means which defines an ultra high vacuum enclosure for the field emitter. A lens which serves as part of the ultra high vacuum enclosure for the source defines a differential pressure aperture. Other lens elements draw electrons from the field emitter and form a focus on axis in the vicinity of the differential pressure aperture, which serves as an effective point source for the associated electron beam system. The source may be permanently built-in or modular; if modular, it may be assembled, tested, and stored in an ultra high vacuum operative condition for OEM assembly or as a replacement part.
REFERENCES:
patent: 3678333 (1972-07-01), Coates et al.
patent: 4019077 (1977-04-01), Sakitani
patent: 4074313 (1978-02-01), Reisner et al.
patent: 4725736 (1988-02-01), Crewe
Journal of Applied Physics, vol. 39, No. 13, 12/68, Crewe et al., "A High Resolution Scanning Transmission Electron Microscope", pp. 5861-5868.
J. Vac. Sci. Tech. A3(2), Mar./Apr. 1985, Giorgio et al., "An Updated Review of Getters and Gettering", p. 417-423.
Moore David K.
O'Shea Sandra L.
Orchid One
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