Encapsulated active transducer and method of fabricating the...

Details Encapsulated active transducer and method of fabricating the... Encapsulated active transducer and method of fabricating the...

2010-02-17

2011-10-18

Dougherty, Thomas (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S328000

Reexamination Certificate

active

08040020

ABSTRACT:
A micro-electromechanical systems (MEMS) ultrasonic transducer device includes a substrate defining an opening and an active transducer having multiple of active layers stacked over the opening of the substrate. The active transducer is completely encapsulated by multiple passivation layers.

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