Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1991-12-13
1994-03-29
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430323, 430325, G03F 500
Patent
active
052983528
ABSTRACT:
A photo printing plate having an upper air evacuation channel and a lower air evacuation channel with the lower air evacuation channel formed in a emulsion layer and the upper air evacuation channels formed by spacers located partially on top of the opaque pattern that projects outward from the emulsion layer and partially on top of the nonopaque emulsion layer adjacent to the opaque pattern to provide an air evacuation channel formed by the evacuation channels in the emulsion surface and the spacers so that the air can be rapidly evacuated between the photo printing plate and a layer of etchant resist while maintaining the layer of etchant resist less than 10 microns from the top surface of the photo printing plate.
REFERENCES:
patent: 3615468 (1971-10-01), Tiala
patent: 4248948 (1981-02-01), Matsuda
patent: 5149608 (1992-09-01), Deibler et al.
BMC Industries, Inc.
McCamish Marion E.
Rosasco S.
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