Thermal measuring and testing – Emissivity determination
Patent
1988-04-27
1990-04-24
Cuchlinski, Jr., William A.
Thermal measuring and testing
Emissivity determination
374126, 374128, 374133, 356 43, 350438, 350439, 2503383, 250339, G01J 510, G01N 2500
Patent
active
049195425
ABSTRACT:
Radiation detectors and method measure the emissivity of a remote, heated semiconductor wafer in the presence of ambient radiation. Incident radiation within a selected waveband from a controlled source intermittently radiates the remote wafer, and reflected radiation therefrom is detected in synchronism with the intermittent incident radiation to yield output indications of emissivity of the wafer under varying processing conditions. The temperature of the wafer is monitored by another radiation detector (or detectors) operating substantially within the same selected waveband, and the temperature indications thus derived are corrected in response to the output indications of emissivity to provide indications of the true temperature of the wafer.
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Bacile Nick J.
Blonigan Wendell T.
Nulman Jaim
AG Processing Technologies, Inc.
Cuchlinski Jr. William A.
Gutierrez Diego F. F.
Smith A. C.
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