Optical waveguides – Optical fiber bundle – Imaging
Patent
1998-10-28
2000-08-29
Lee, John D.
Optical waveguides
Optical fiber bundle
Imaging
385117, 385902, G02B 606
Patent
active
061120049
ABSTRACT:
An emission microscopy system with a coherent illuminator system and method wherein an incident energy beam is directed at an end of image conduit rotating around its axis. The incident energy beam may be generated by a laser or similar radiation source. A substantially cylindrically uniform radiation spot is obtained from the other end of the image conduit, which may be guided by waveguide means to an emission microscope used in IC failure analysis.
REFERENCES:
patent: 4660925 (1987-04-01), McCaughan, Jr.
patent: 4811090 (1989-03-01), Khurana
patent: 4997259 (1991-03-01), Ichimura et al.
patent: 5044717 (1991-09-01), Levatter
patent: 5140289 (1992-08-01), Andrieu et al.
patent: 5263110 (1993-11-01), Anderson
patent: 5303373 (1994-04-01), Harootian, Jr.
patent: 5475316 (1995-12-01), Hurley et al.
patent: 5522006 (1996-05-01), Takeuchi et al.
patent: 5534000 (1996-07-01), Bruce
patent: 5536265 (1996-07-01), van den Bergh et al.
patent: 5548670 (1996-08-01), Koike
patent: 5632767 (1997-05-01), Sinofsky
patent: 5695583 (1997-12-01), van den Bergh et al.
patent: 5698474 (1997-12-01), Hurley
patent: 5754717 (1998-05-01), Esch
patent: 5764409 (1998-06-01), Colvin
James Colvin; ESD Failure Analysis Methodology; Microelectronics Reliability; Nov. 1998; vol. 38; No. 11; pp. 1705-1714.
Lee John D.
Song Sarah N
LandOfFree
Emission microscopy system and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Emission microscopy system and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Emission microscopy system and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1257155