Embedded power and ground plane structure

Details Embedded power and ground plane structure Embedded power and ground plane structure

1997-06-11

1999-02-23

Brown, Peter Toby

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

257759, 257774, 257776, H01L 2348

Patent

active

058747788

ABSTRACT:
A device architecture with embedded planar conductive ground and power planes in the device architecture. The apparatus includes a first conductive plane, a second conductive plane, a signal plane disposed between the first and second conductive planes, and a logic level disposed adjacent the first conductive plane and connected to the signal plane through at least one via in the conductive plane. The apparatus also includes a built-in alignment scheme. The invention includes a method for making the device and alignment architectures.

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