Elimination of turbulence for silicon micromachined airflow sens

Details Elimination of turbulence for silicon micromachined airflow sens Elimination of turbulence for silicon micromachined airflow sens

1989-08-07

1990-09-11

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320426, G01F 168

Patent

active

049552309

ABSTRACT:
The sensor comprises a silicon sensing element on a ceramic substrate. A slot is provided in the substrate just ahead of the leading edge of the silicon so that some of the airflow that is flowing toward the leading edge surface of the silicon passes through the slot. This promotes a less turbulent flow over the sensing face of the silicon.

REFERENCES:
patent: 4856328 (1989-08-01), Johnson

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