Elimination of strike-over in RF plasma guns

Details Elimination of strike-over in RF plasma guns Elimination of strike-over in RF plasma guns

1991-02-13

1993-08-03

Gregory, Bernarr E.

Electric heating

Metal heating

By arc

219 7616, 21912136, 21912145, B23K 900, B23K 1002

Patent

active

052331555

ABSTRACT:
Strike-over in an RF plasma gun is eliminated by interposing a grounded isolation device between the plasma jet and the RF coil which supplies energy to the plasma. The isolation device comprises a plurality of separated segments spaced apart in a circumferential direction and electrically connected together at one end and to ground potential. The shield substantially eliminates the parasitic distributed capacitance between the RF coil and the plasma by interrupting the electrical field coupling between the coil and the plasma and shunting most of the capacitive current flow to ground. The invention enables reliable operation of the device at frequencies in the 2-4 MHz range.

REFERENCES:
patent: 3818174 (1974-06-01), Camacho
patent: 4527550 (1985-07-01), Ruggera et al.
C. Kittel, Intro. to Solid State Physics; (John Wiley & Sons, 1976; pp. 293-301).

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