Elimination of sticking of micro-mechanical devices

Details Elimination of sticking of micro-mechanical devices Elimination of sticking of micro-mechanical devices

1994-02-23

1995-05-02

Leung, Philip H.

Electric heating

Microwave heating

With diverse device

219750, 359230, 359900, H05B 680

Patent

active

054121868

ABSTRACT:
A method of preventing sticking of moving parts of a micro-mechanical device. A set of microwave frequencies, which will cause water molecules to resonate, is determined. From this set of frequencies, an applied frequency that will provide an efficient energy coupling from the source to the device is selected. The device is continuously irradiated with radiation of this frequency.

REFERENCES:
patent: 4196332 (1980-04-01), Mackayb et al.
patent: 5200735 (1993-04-01), Hines
patent: 5331454 (1994-07-01), Hornbeck

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