Eliminating stiction with the use of cryogenic aerosol

Details Eliminating stiction with the use of cryogenic aerosol Eliminating stiction with the use of cryogenic aerosol

1997-06-11

2000-03-14

Stinson, Frankie L.

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

134 7, 134 36, 134902, B08B 302

Patent

active

060367865

ABSTRACT:
Stiction in a microstructure may be eliminated by directing a cryogenic aerosol at the portion of the microstructure subject to stiction with sufficient force so as to free the portion of the microstructure.

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