Elevator-based tool loading and buffering system

Details Elevator-based tool loading and buffering system Elevator-based tool loading and buffering system

2005-08-23

2010-10-05

Adams, Gregory W (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

C414S277000, C414S217000, C414S940000

Reexamination Certificate

active

07806643

ABSTRACT:
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.

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