Measuring and testing – With fluid pressure – Leakage
Patent
1983-07-19
1985-11-19
Levy, Stewart J.
Measuring and testing
With fluid pressure
Leakage
73 493, 374 5, G01M 320
Patent
active
045534357
ABSTRACT:
A novel method and apparatus for detecting leaks in glass-to-metal seals of microelectronic devices and the like are described which comprise a double-gasketed vacuum station including a base plate having a central hole and a first gasket for exposing one side of the seals to a leak detector; a vacuum fixture surrounding the device provides a marginal region therearound which can be evacuated to prevent helium from permeating the first gasket; the vacuum fixture includes a central opening to expose the other side of the seals to a helium-containing atmosphere within a shroud enclosing the device and vacuum fixture; a second gasket provides a seal between the vacuum fixture and device periphery at the central opening in the fixture. For leak tests under controlled time/temperature conditions, an adjacent infrared lamp is used to radiantly heat the package containing the glass-to-metal seals, and a mask is included to avoid direct radiant heating of the gaskets and glass-to-metal seals.
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Goldfarb Harold
Perkins Kenneth L.
Weigand Bernard L.
Levy Stewart J.
Scearce Bobby D.
Singer Donald J.
The United States of America as represented by the Secretary of
Williams Hezron E.
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