Power plants – Motor operated by expansion and/or contraction of a unit of... – Mass is a solid
Reexamination Certificate
2000-04-13
2002-01-15
Nguyen, Hoang (Department: 3748)
Power plants
Motor operated by expansion and/or contraction of a unit of...
Mass is a solid
C060S527000
Reexamination Certificate
active
06338249
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates generally to micro-actuators, and particularly to switching of micromirrors in microelectromechanical systems (MEMS).
2. Technical Background
Micromechanical actuators are essential for microelectromechanical systems (MEMS) that require movable components. For applications such as a free-space optical fiber switch or for self-assembly of a three-dimensional MEMS structure, a compact actuator with long-range fast-speed traveling ability is often necessary. Known actuators have mechanical power transmission mechanisms based on an electrostatic driving element, such as scratch drive actuators, resonator-based vibromotors, microengines and stepper motors. Most of the devices, however, require not only large areas (>1 mm
2
) but also large driving voltages (10's of volts to more than 100 volts). Moreover, either two sets of actuators or complicated phase-matching operation is required for the actuators to have a two-direction actuation capability. As multiple devices are needed on a chip, the actuators desired need to occupy a sufficiently small space and be driven using low voltages. It is further desired to be able to change the direction of the actuator by simply adjusting the applied electrical current, in order to save space and simplify the power supply design of the MEMS
REFERENCES:
patent: 4553394 (1985-11-01), Weinert
patent: 5335498 (1994-08-01), Komatsu et al.
patent: 5396769 (1995-03-01), Brudnicki
patent: 5426070 (1995-06-01), Shaw et al.
patent: 5628917 (1997-05-01), MacDonald et al.
patent: 5719073 (1998-02-01), Shaw et al.
patent: 5726073 (1998-03-01), Zhang et al.
patent: 5846849 (1998-12-01), Shaw et al.
patent: 5996346 (1999-12-01), Maynard
E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner and D. Muchmeyer-Fabrication of microstructures with high aspect ratios and great structural heights by synchroton radiation lithography, gavanoforming, and plastic moulding (LIGA process)—Mar. 3, 1986.
Jurgen Mohr, Jost Gottert, Andre Muller, Patrick Ruther, Klaus Wengeling, Forschungszentrum Karlsruhe and Institute fUr Mikrostructurtechnik-Micro-Optical and Opto-Mechanical Systems Fabricated by the LIGA Technique.
Soek-Whan Chung and Yong-Kewon Kim-Measurements of a Fabricated Micro Mirror Using a Lateral-Effect Position-Sensitive Photodiode—Dec. 1998.
Meng-Hsiung Kiang, Olav Solgaard, Kam Y. Lau, and Richard S. Muller-Electrostatic Combdrive-Actuated Micromirrors for Laser-Beam Scanning and Positioning—Mar., 1998.
Cornel Marxer, Christian Thio, Marc-Alexia Gretillat, Nicolaas F. de Rooij, Rainer Battig, Oliver Anthamatten, Bernd Valk and Paul Vogel-Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Application-Sep., 1997.
Yuji Uenishi, Masahiro Tsugai and Mehran Mehregany—Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon.
Pai Minfan
Tien Norman C.
Agon Juliana
Corning Incorporated
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