Electrothermal sensor apparatus

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H01L 2356, H01L 2966

Patent

active

051403943

ABSTRACT:
A protective circuit capable of remotely switching power to a load on and off and including an electrothermal sensor system having a heating element of predetermined resistance in series with the load and source of power whereby the temperature of the heating element is monitored relative to ambient temperature to determine current flow in the heater. The electrothermal sensor, according to one embodiment, includes a ceramic substrate having the heater formed thereon with a first deposited heat monitoring element thereon for monitoring the temperature of the heater and a second heat monitoring element thereon for monitoring the ambient temperature of the substrate remote from the heater. The electrothermal sensor, according to a second embodiment, includes a layer of electrically conductive material, a backing layer thereon of electrically insulating material, a grid on the backing layer of thermoresponsive material to form RTDs and a second layer of electrically insulating material over said grid.

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