Electrothermal self-latching MEMS switch and method

Details Electrothermal self-latching MEMS switch and method Electrothermal self-latching MEMS switch and method

2005-04-19

2005-04-19

Vortman, Anatoly (Department: 2835)

Electricity: electrothermally or thermally actuated switches

Electrothermally actuated switches

With longitudinally expansible solid element

C337S012000, C337S014000, C337S036000, C060S528000, C060S529000, C310S307000

Reexamination Certificate

active

06882264

ABSTRACT:
Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch having a movable microcomponent is provided and includes a substrate having a stationary contact. The switch can also include a structural layer having a movable contact positioned for contacting the stationary contact when the structural layer moves toward the substrate. An electrothermal latch attached to the structural layer and having electrical communication with the movable contact to provide current flow between the electrothermal latch and the stationary contact when the movable contact contacts the stationary contact for maintaining the movable contact in contact with the stationary contact.

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