Electrostrictive mirror actuator for use in optical projection s

Details Electrostrictive mirror actuator for use in optical projection s Electrostrictive mirror actuator for use in optical projection s

1994-05-20

1995-11-21

Shafer, Ricky D.

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

359224, 359291, 359295, 359872, 310328, 310333, 310366, G02B 7182, G02B 2608, H01L 4108

Patent

active

054693020

ABSTRACT:
An electrostrictive mirror actuator for use in an optical projection system, comprising: an active matrix substrate including a substrate, a transistor and a connecting terminal thereon; an electrostrictive actuator mounted on said active matrix substrate, including an electrostrictive member having a top and a bottom surfaces, a common signal electrode, a bias electrode and a reference electrode, wherein the top surface of the electrostrictive member is evenly separated by a trench of a fixed depth formed thereon and running across the top surface, thereby creating a first actuatig member having a first top surface and a second actuating member having a second top surface, said common signal electrode being located on the bottom surface thereof, said bias and said reference electrodes being located on the first top surface and the second top surface, respectively; a hinge provided with a flat top surface and a bottom surface having a protrusion fitted to the trench; and a mirror mounted on the flat top surface of said hinge.

REFERENCES:
patent: 4248504 (1981-02-01), Albertinetti et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5085497 (1992-02-01), Um et al.
patent: 5159225 (1992-10-01), Um
patent: 5212582 (1993-05-01), Nelson

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